A Novel Optical Method for Measuring the Thin Film Stress
The International Symposium on Photonics and Optoelectronics(SOPO 2014)——This paper proposes a thin-film stress measurement system. The phase of the optimized heterodyne signal can be extracted by the least-squares sine fitting algorithm and then the surface profile of the tested flexible substrate can subsequently be acquired. Using polynomial fitting method to depict the cross-section curve of the substrate, estimating the resultant curvature radii of the uncoated and coated substrates, and substituting these two radii into the corrected Stoney formula, the thin-film stress of the flexible substrate can consequently be obtained. This method features high stability and high resolution due to the introduction of the projection and heterodyne interferometry.
关键词： 薄膜应力 光外差 投影 干涉法 The International Symposium on Photonics and Optoelectronics(SOPO 2014)
主讲人：A.P. Yen-Chang Chu 机构：Ph.D.program of Electrical and Communications Engineering,Feng Chia University
时长：0:09:08 年代：2014年
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