Large Response Current of Vacuum Pressure Sensor Based on Vertically-Aligned ZnO Nanowires Array(2)
2014 International Conference on Functional Materials(ICFM 2014)——Vertically-aligned ZnO nanowires(VA-ZnO-NWs) array was prepared through chemical vapor deposition to fabricate the vacuum pressure sensor,and its sensitive characteristics were measured by using semiconductor parameter tester.
关键词: 真空压力传感器 电流响应 氧化锌纳米线阵列 2014 International Conference on Functional Materials(ICFM 2014)
主讲人:Ding Wang 机构:University of Shanghai for Science and Technology
时长:0:15:23 年代:2014年
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