Silicon Carbide Electrothermally Tunable MEMS Resonators
The 7th Global Conference on Materials Science and Engineering(CMSE 2018)——Design,fabrication and operation of two-port MEMS resonant devices actuated electrothermally and sensed piezoelectrically.
关键词: Silicon Carbide;MEMS;Resonators The 7th Global Conference on Materials Science and Engineering(CMSE 2018)
主讲人:Prof. Boris Svilicic 机构:University of Rijeka,Croatia
时长:0:13:20 年代:2018年
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