Silicon Carbide Electrothermally Tunable MEMS Resonators

The 7th Global Conference on Materials Science and Engineering(CMSE 2018)——Design,fabrication and operation of two-port MEMS resonant devices actuated electrothermally and sensed piezoelectrically.


关键词: Silicon Carbide;MEMS;Resonators The 7th Global Conference on Materials Science and Engineering(CMSE 2018)

主讲人:Prof. Boris Svilicic 机构:University of Rijeka,Croatia

时长:0:13:20 年代:2018年