Effects of PEM Controlled Reaction Atmosphere on Composition and Structure of Carbon Doped Ti-O Films

2016中国国际功能材料大会(CIFM 2016)——Carbon-doped Ti-O films were prepared by Unipolar reactive magnetron sputtering using CO2 and O2 controlled by PEM.


关键词: film;silicon wafer;reaction magnetron sputtering

主讲人:Jianlu Xue 机构:Hainan University, China

时长:0:10:49 年代:2016年