Growth of Thin Films Through Two Laser Ablation in the Pulsed Laser Deposition System

2016中国国际功能材料大会(CIFM 2016)——Pulsed laser deposition is a physical vapor deposition technique where a high-power pulsed laser beam is focused inside a vacuum chamber to strike a target of the material that is to be deposited.

关键词: pulsed laser deposition;thin film;laser beam

主讲人:A.P. Weier Lu 机构:Microelectronics equipment research centre Institute of Microelectronics, CAS

时长:0:16:10 年代:2016年