Large Response Current of Vacuum Pressure Sensor Based on Vertically-Aligned ZnO Nanowires Array(1)

2014 International Conference on Functional Materials(ICFM 2014)——Vertically-aligned ZnO nanowires(VA-ZnO-NWs) array was prepared through chemical vapor deposition to fabricate the vacuum pressure sensor,and its sensitive characteristics were measured by using semiconductor parameter tester.


关键词: 真空压力传感器 电流响应 氧化锌纳米线阵列 2014 International Conference on Functional Materials(ICFM 2014)

主讲人:Ding Wang 机构:University of Shanghai for Science and Technology

时长:0:13:35 年代:2014年